Scanning probe charge reading of ferroelectric domains

被引:9
|
作者
Kim, Byong M. [1 ]
Adams, Donald E. [1 ]
Tran, Quan [2 ]
Ma, Qing [2 ]
Rao, Valluri [2 ]
机构
[1] Nanochip Inc, Fremont, CA 94538 USA
[2] Intel Corp, Components Res, Santa Clara, CA 95052 USA
关键词
dielectric polarisation; electric domains; ferroelectric thin films; lead compounds; piezoelectric thin films; piezoelectricity; MICROSCOPY;
D O I
10.1063/1.3081020
中图分类号
O59 [应用物理学];
学科分类号
摘要
A scanning probe charge-detection technique based on direct piezoelectric effect is demonstrated to read alternating bit polarizations in a ferroelectric media The bit signal is generated by spatially modulating charges interacting with a probe tip scanning in contact with the media. A periodicity of the bits is used with an appropriate scan speed to modulate the signal frequency. A signal-to-noise ratio of 10 dB has been achieved for a contact force of 100 nN. The modulation of the bit signal frequency into the 2 kHz data rate is achieved by coupling 0.4 mu m spacing between alternating polarizations with scanning speed of 1.6 mm/s.
引用
收藏
页数:3
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