Simulation of isotope effects in single crystal sputtering

被引：0
|
作者：
Shulga, VI [2 ]
机构：
[1] Odense Univ, Dept Phys, DK-5230 Odense M, Denmark
[2] Moscow MV Lomonosov State Univ, Inst Nucl Phys, Moscow 119899, Russia
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1999年 / 147卷 / 04期
关键词：
sputtering; single crystal; molybdenum; argon; computer simulation; isotope effects; channeling; transparency;
D O I：
10.1080/10420159908226991
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
Sputlering of isoopic (001), (011), and (111) Mo single crystals with 0.15-10 keV Arions at low fluences has been studied by means of computer simulation. Attention was given to the dependence of the preferential emission of light isotopes on ion energy and direction of incidence. It has been shown that the enrichment in light isotopes results mainly from a high contribution to sputtering of recoils of low generations which, in turn, correlates very closely with the crystal transparency and accompanying channeling effects. At glancing incidence, the preferential emission of light isotopes is strongly affected by the surface channeling of bombarding particles.
引用
收藏
页码：225 / 239
页数：15
相关论文
共 50 条
  • [1] A SINGLE-CRYSTAL CARBON SELF-SPUTTERING SIMULATION
    SMITH, R
    WEBB, RP
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1991, 59 : 1378 - 1382
  • [2] SIMULATION OF ISOTOPE EFFECTS IN THE SPUTTERING OF CU-63-CU-65
    ZHENG, LP
    LI, RS
    LI, DX
    VACUUM, 1995, 46 (03) : 277 - 280
  • [3] SIMULATION OF ENERGY-DEPENDENT ISOTOPE SPUTTERING
    SHULGA, VI
    SIGMUND, P
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1995, 103 (03): : 383 - 386
  • [4] THEORY OF SINGLE CRYSTAL SPUTTERING
    MARTYNEN.YV
    SOVIET PHYSICS SOLID STATE,USSR, 1965, 6 (07): : 1581 - +
  • [5] COMPUTER-SIMULATION OF SINGLE-CRYSTAL AND POLYCRYSTAL SPUTTERING .1.
    SHULGA, VI
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1983, 70 (1-4): : 65 - 83
  • [6] COMPUTER-SIMULATION OF TEMPORAL ASPECTS OF THE COPPER SINGLE-CRYSTAL SPUTTERING
    HOU, M
    ECKSTEIN, W
    ROBINSON, MT
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (02): : 234 - 241
  • [7] COMPUTER-SIMULATION OF SINGLE-CRYSTAL AND POLYCRYSTAL SPUTTERING .3.
    SHULGA, VI
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1985, 84 (1-2): : 1 - 25
  • [8] Simulation of ion sputtering of copper clusters from single crystal graphite surface
    Kornich, GV
    Betz, G
    Zaporojtchenko, VI
    Bazhin, AI
    TECHNICAL PHYSICS LETTERS, 2003, 29 (11) : 938 - 940
  • [9] COMPUTER-SIMULATION OF SINGLE-CRYSTAL AND POLYCRYSTAL SPUTTERING .2.
    SHULGA, VI
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1984, 82 (3-4): : 169 - 187
  • [10] Simulation of ion sputtering of copper clusters from single crystal graphite surface
    G. V. Kornich
    G. Betz
    V. I. Zaporojtchenko
    A. I. Bazhin
    Technical Physics Letters, 2003, 29 : 938 - 940
12345