Imaging the substrate/film interface of thin films of diblock copolymers on chemically patterned surfaces

被引：6
|
作者：
Yang, XM
Peters, RD
Nealey, PF [1 ]
机构：
[1] Univ Wisconsin, Dept Chem Engn, Madison, WI 53706 USA
[2] Univ Wisconsin, Ctr Nanotechnol, Madison, WI 53706 USA
来源：
MACROMOLECULES | 2002年 / 35卷 / 06期
关键词：
D O I：
10.1021/ma0111966
中图分类号：
O63 [高分子化学（高聚物）];
学科分类号：
070305 ; 080501 ; 081704 ;
摘要：
The imaging of substrate/film interface of thin films of diblock copolymers on chemically patterned surfaces was presented. The float-and-collect technique allowed the investigation of in-plane ordering in two dimensions of structures in the film and specifically at the substrate/film interface. Results showed that the phase imaging resulted in better contrast than LFM and the resolution of LFM was limited below 100 nm.
引用
收藏
页码：2406 / 2409
页数：4
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