Microscopic characterization of ablation craters produced by femtosecond laser pulses

被引:5
|
作者
Temnov, VV [1 ]
Sokolowski-Tinten, K [1 ]
Stojanovic, N [1 ]
Kudryashov, S [1 ]
von der Linde, D [1 ]
Kogan, B [1 ]
Schlarb, A [1 ]
Weyers, B [1 ]
Möller, R [1 ]
Seekamp, J [1 ]
Sotomayor-Torres, C [1 ]
机构
[1] Univ Essen Gesamthsch, Inst Laser & Plasma Phys, D-45117 Essen, Germany
来源
关键词
laser ablation; laser surface modification;
D O I
10.1117/12.482062
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
The formation of well-defined craters is a general feature of laser ablation with ultrashort laser pulses, indicative of a sharp ablation threshold. Results of a microscopic characterization of ablation craters on semiconductors after irradiation with single intense ultrashort laser pulses are presented.
引用
收藏
页码:1032 / 1039
页数:8
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