Full-field surface measurement technique for optical metrology applications

被引：0

作者：

Wee, KH ^{[1
]}

Ping, S ^{[1
]}

Chye, TC ^{[1
]}

Jing, LW ^{[1
]}

机构：

[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 2263, Singapore

来源：

PHOTONIC SYSTEMS AND APPLICATIONS | 2001年 / 4595卷

关键词：

D O I：

10.1117/12.446619

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

The Shape of an object can be determined by analyzing the distortion of optical grating projected onto it. Many available approaches could be used for this kind of analysis, however most of them require massive computation such as Fourier transformation. Alternatively, direct image processing could be used to give an efficient and accurate result The profile of the object can be expressed in terms of wire-frame or texture mapped model.

引用

页码：237 / 242

页数：6

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