Design of a new PZT based microphone and microspeaker

被引：0
|
作者：
Ren, TL [1 ]
Zhang, LT [1 ]
Liu, LT [1 ]
Li, ZJ [1 ]
机构：
[1] Tsing Hua Univ, Inst Microelect, Beijing 100084, Peoples R China
来源：
INTEGRATED FERROELECTRICS | 2001年 / 41卷 / 1-4期
关键词：
cantilever structure; multimorph model; PZT; ferroelectrics;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A new Pb(Zr0.53Ti0.47)O-3 (PZT) based cantilever structure composed of Pt/Ti/PZT/Pt/Ti/SiO2/Si3N4 multilayer is designed for integrated microphone and mirospeaker. The cantilever structure is theoretically studied and designed using a multimorph model. The properties of the PZT-based and ZnO-based cantilevers are compared.
引用
收藏
页码：1753 / 1758
页数：6
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