Surface plasmon-enhanced amorphous-silicon-nitride light emission with single-layer gold waveguides

被引：1
|
作者：
Chen, Keyong [1 ]
Feng, Xue [1 ]
Huang, Yidong [1 ]
机构：
[1] Tsinghua Univ, Dept Elect Engn, State Key Lab Integrated Optoelect, Beijing 100084, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2013年 / 11卷 / 02期
基金：
中国国家自然科学基金;
关键词：
QUANTUM EFFICIENCY; SI NANOCRYSTALS; ELECTROLUMINESCENCE; PHOTOLUMINESCENCE; LUMINESCENCE; FILMS; DOTS;
D O I：
10.3788/COL201311.022401
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Surface-plasmon (SP) enhancement of amorphous-silicon-nitride (a-SiNx) light emission with single-layer gold (Au) waveguides is experimentally demonstrated through time-resolved photoluminescence measurement. The a-SiNx active layer with strong steady-state photoluminescence at 560 nm is prepared by plasma-enhanced chemical vapor deposition, and the Au waveguide on the top of the a-SiNx layer is fabricated by magnetron sputtering. The maximum Purcell factor value of similar to 3 is achieved with identified SP resonance of the Au waveguide at similar to 530 nm.
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页数：3
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