The role of the pressure in pulsed laser deposition of bioactive glass films

被引:22
|
作者
Zhao, Yafan [1 ]
Song, Mingda [2 ]
Chen, Chuanzhong [3 ]
Liu, Jian [4 ]
机构
[1] Shandong Architecture Univ, Jinan 250014, Peoples R China
[2] Shandong Special Equipment Inspect & Res Acad, Jinan 250013, Peoples R China
[3] Shandong Univ, Sch Mat Sci & Engn, Jinan 250061, Peoples R China
[4] Shandong Univ, Sch Mech Engn, Jinan 250061, Peoples R China
关键词
mechanical alloying;
D O I
10.1016/j.jnoncrysol.2008.05.019
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Effects of the At pressure on the morphology, structure. bonding configuration and deposition rate of the bioglass thin films were investigated by atomic force microscopy (AFM), scanning electron microscopy (SEM), X-ray diffraction (XRD), Fourier transform infrared spectroscopy (FTIR) and crystal lattice monitor. At pressure has an influence on the quantity and shapes of the particles generated in the PLD process. The target bonding configuration is not correctly transferred to the films. This effect is attributed to the network rearrangement during the film growth, which is associated to special structure of glass and complex physical mechanisms of PLD. Deposition rate decreases as the pressure increases following a linear dependence. (C) 2008 Elsevier B.V. All rights reserved.
引用
收藏
页码:4000 / 4004
页数:5
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