Fabrication of Low-Cost Multiwavelength Laser Arrays for OLTs in WDM-PONs by Combining the SAG and BIG Techniques

被引:10
|
作者
Han, Liangshun [1 ]
Liang, Song [1 ]
Wang, Huitao [1 ]
Xu, Junjie [1 ]
Qiao, Lijun [1 ]
Zhu, Hongliang [1 ]
Wang, Wei [1 ]
机构
[1] Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China
来源
IEEE PHOTONICS JOURNAL | 2015年 / 7卷 / 04期
基金
中国国家自然科学基金;
关键词
Integrated optics devices; laser arrays; DFB; TECHNOLOGY;
D O I
10.1109/JPHOT.2015.2439957
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We present the fabrication of a low-cost multiwavelength laser array monolithically integrated with a passive optical combiner for optical line terminals (OLTs) in wavelength-division multiplexing (WDM) passive optical networks (PONs). By combining the upper separate confinement heterostructure layer selective area growth technique and the bundle integrated guide technique, both multiwavelength emission with highly uniform spacing and low-loss passive-waveguide material can be obtained in a single metal-organic chemical vapor deposition (MOCVD) growth step, which greatly simplifies the fabrication of the device. A prototype laser array, which has four distributed feedback (DFB) laser elements and a multimode interference coupler as combiner, is successfully fabricated. The shallow ridge structure of the DFB lasers and the deep ridge structure of the passive waveguides are obtained by a single dry etching step, which further eases the device fabrication. The properties of the device are measured and discussed. The results indicate that our method is promising for fabricating cost-effective OLT light sources for WDM-PONs.
引用
收藏
页数:7
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