Numerical analysis of laser ablation and damage in glass with multiple picosecond laser pulses

被引：68

作者：

Sun, Mingying ^{[1
,2
,3
]}

Eppelt, Urs ^{[2
,4
]}

Russ, Simone ^{[5
]}

Hartmann, Claudia ^{[2
]}

Siebert, Christof ^{[6
]}

Zhu, Jianqiang ^{[1
]}

Schulz, Wolfgang ^{[2
,4
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Natl Lab High Power Laser & Phys, Shanghai 201800, Peoples R China

[2] Fraunhofer Inst Laser Technol, D-52074 Aachen, Germany

[3] Univ Chinese Acad Sci, Beijing 100049, Peoples R China

[4] Rhein Westfal TH Aachen, D-52074 Aachen, Germany

[5] TRUMPF Laser GmbH Co KG, D-78713 Schramberg, Germany

[6] TRUMPF Laser & Syst Tech GmbH, D-71254 Ditzingen, Germany

来源：

OPTICS EXPRESS | 2013年 / 21卷 / 07期

关键词：

FUSED-SILICA; FEMTOSECOND; IONIZATION; MECHANISMS;

D O I：

10.1364/OE.21.007858

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This study presents a novel numerical model for laser ablation and laser damage in glass including beam propagation and nonlinear absorption of multiple incident ultrashort laser pulses. The laser ablation and damage in the glass cutting process with a picosecond pulsed laser was studied. The numerical results were in good agreement with our experimental observations, thereby revealing the damage mechanism induced by laser ablation. Beam propagation effects such as interference, diffraction and refraction, play a major role in the evolution of the crater structure and the damage region. There are three different damage regions, a thin layer and two different kinds of spikes. Moreover, the electronic damage mechanism was verified and distinguished from heat modification using the experimental results with different pulse spatial overlaps. (c) 2013 Optical Society of America

引用

页码：7858 / 7867

页数：10

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