Influence of the laser power on the optical properties of MoO3 thin films prepared by CO2 laser evaporation

被引：2

作者：

Zuluaga, M. ^{[1
]}

Pardo, A. ^{[1
]}

Torres, J. ^{[1
]}

Alfonso, J. E. ^{[1
]}

机构：

[1] Univ Nacl Colombia, Dept Phys, Grp Mat Technol Applicat, GMAT, Bogota, DC, Colombia

来源：

MICROELECTRONICS JOURNAL | 2008年 / 39卷 / 11期

关键词：

Thin films; Transmittance; XRD;

D O I：

10.1016/j.mejo.2008.01.010

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

MoO3 thin films were prepared in this work by evaporating an MoO3 target using a CO2 laser operating on a continuous wave mode. The samples were grown at different laser light intensities. They were characterized through X-ray diffraction and transmittance measurements in the visible spectrum. The optical properties of the material were determined from the simulation of the experimental transmittance spectra. It was found that samples prepared Lit low laser intensities grow in the phase of MoO3. The samples present a mix of MoO3 phases alpha, beta and beta' if the laser intensity is increased. The refraction index values decrease when laser radiation is increased. (C) 2008 Published by Elsevier Ltd.

引用

页码：1264 / 1265

页数：2

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