Influence of Ne+ bombarding energy on the properties of diamond-like carbon film by ion beam assisted deposition

Diamond-like carbon (DLC) films were prepared at different bombarding energies by ion beam assisted deposition (IBAD) at a lower deposition temperature. It was found that the film bombarded by the Ne ion beam with an energy of 200 eV possessed the highest fraction of sp3 bonding using Raman spectroscopy. The field emission behavior of the DLC film bombarded with a Ne+ energy of 200 eV was also investigated. An onset of emission field as low as 2.6 V/μm was obtained using a flat plate anode configuration. A high electron emission current of about 2.2 × 10-2 mA over a 1 cm2 cathode area was observed at the electric field of 5V/μm.