High-precision alignment of electron tomography tilt series using markers formed in helium-ion microscope

被引：5
|
作者：
Hayashida, M. [1 ]
Iijima, T. [2 ]
Tsukahara, M. [2 ]
Ogawa, S. [3 ]
机构：
[1] Natl Inst Adv Ind Sci & Technol, Natl Metrol Inst Japan, Tsukuba, Ibaraki 3058565, Japan
[2] AIST, Tsukuba Innovat Arena Headquaters, Tsukuba, Ibaraki 3058569, Japan
[3] AIST, Nanoelect Res Inst, Tsukuba, Ibaraki 3058569, Japan
来源：
MICRON | 2013年 / 50卷
关键词：
Transmission electron microscope; Electron tomography; Helium-ion microscopy; Fiducial marker; Tilt series; Alignment precision; AUTOMATIC ALIGNMENT;
D O I：
10.1016/j.micron.2013.04.002
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Tungsten nanodots formed in a helium-ion microscope (HIM) provide a practical means of aligning markers of electron tomography tilt series with a high degree of precision. The nanodots were formed using a HIM equipped with a W(CO)(6) gas injection system, enabling the precise placement of the nanodots at desired locations of a sample. Template matching was applied to the markers formed in the HIM to detect the positions automatically. The relation between the positions of the markers and the accuracy of the alignment was also determined in order to achieve precise alignment. The method was applied to the markers in order to reconstruct three-dimensional (3D) images of a rod-shaped specimen that contained a 65-nm-diameter via structure in a Cu/Low-k interconnect. (c) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码：29 / 34
页数：6
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