AFM study of 2D resonators based on Diamond-Like-Carbon

被引：0
|
作者：
Thibert, S. [1 ]
Ghis, A. [1 ]
Delaunay, M. [2 ]
机构：
[1] CEA LETI, MINATEC Campus,17 Rue Martyrs, F-38054 Grenoble, France
[2] Univ Grenoble Alpes, CEA INAC, CEA INAC PHELIQS, F-38054 Grenoble, France
来源：
2016 IEEE 16TH INTERNATIONAL CONFERENCE ON NANOTECHNOLOGY (IEEE-NANO) | 2016年
关键词：
NANOMECHANICAL RESONATORS;
D O I：
暂无
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
This paper focuses on the study of an ultrathin Diamond-Like-Carbon layer acting as the mobile part of 2D microresonators. To overcome the low electrical conductivity of amorphous carbon, DLC is used in combination with few nanometer-thick metal layers to manufacture 15 to 20 nm thick membranes suspended over 0.8 to 2.3 mu m wide trenches. After a description of the experimental means performed on these samples, the measurements of resonance frequencies ranging from 30 MHz to 88 MHz are described. Furthermore, the experimental observation of 2D vibration modes is reported, which opens the path for the development of a new kind of devices.
引用
收藏
页码：479 / 482
页数：4
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