Higher-order Wine Glass Mode Piezoelectric Square Resonator with Improved Quality Factor in Water

被引：0
|
作者：
Ali, Abid [1 ]
Lee, Joshua E. -Y. [2 ]
机构：
[1] City Univ Hong Kong, Dept Elect Engn, Kowloon, Hong Kong, Peoples R China
[2] City Univ Hong Kong, State Key Lab Millimeter Waves, Kowloon, Hong Kong, Peoples R China
来源：
2017 IEEE SENSORS | 2017年
关键词：
MEMS resonator; resonance sensing; higher-order mode in water; piezoelectric-on-silicon;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports on the design and experimental characterization of a higher-order wine glass (third order: WG3) mode MEMS square plate resonator to reduce the effect of fluidic damping and thereby enhancing the quality (Q) factor in water for biosensing applications. We show that the lateral strain profile of the WG3 mode is well suited for fully-differential piezoelectric transduction (which helps to reduce parasitic feedthrough) and offers reasonable electromechanical coupling. We experimentally demonstrate that exciting the WG3 mode in water results in a higher Q factor (Q of 410 at 36.36 MHz) compared to the fundamental wine glass (WG1) mode (Q of 340 at 10.53 MHz).
引用
收藏
页码：112 / 114
页数：3
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