Maskless fabrication of submicron nonharmonic relief gratings for single-frequency DFB semiconductor lasers by three-beam holographic method

被引：2
|
作者：
Khudobenko, AI [1 ]
Panchenko, VY [1 ]
Seminogov, VN [1 ]
机构：
[1] RUSSIAN ACAD SCI,SCI RES CTR TECHNOL LASERS,TROITSK 142092,MOSCOW REG,RUSSIA
来源：
LASERS AS TOOLS FOR MANUFACTURING OF DURABLE GOODS AND MICROELECTRONICS | 1996年 / 2703卷
关键词：
D O I：
10.1117/12.237764
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：576 / 578
页数：3
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