共 50 条
- [36] Synthesis of Si3N4 BOLETIN DE LA SOCIEDAD ESPANOLA DE CERAMICA Y VIDRIO, 2003, 42 (02): : 89 - 92
- [37] SYNTHESIS OF SI3N4 AND SI(3)N4-SIC POWDERS BY AN RF-INDUCTION PLASMA SILICON NITRIDE 93, 1994, 89-9 : 41 - 45
- [40] Si3N4 on GaAs by direct electron cyclotron resonance plasma assisted nitridation of Si layer in Si/GaAs structure JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1998, 16 (02): : 507 - 510