Al2O3 nanotubes fabricated by wet etching of ZnO/Al2O3 core/shell nanofibers

被引:120
|
作者
Hwang, J
Min, BD
Lee, JS
Keem, K
Cho, K
Sung, MY
Lee, MS
Kim, S [1 ]
机构
[1] Korea Univ, Dept Elect Engn, Seoul 136701, South Korea
[2] Samsung Elect Co Ltd, Semicond R&D Div, Proc Dev Team, Yongin, Kyunggi, South Korea
关键词
D O I
10.1002/adma.200305209
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
In nanotube-based electronics, Al2O3 nanotubes will play a very important role. A method is reported that yields nanotubes with controllable, uniform wall thickness. The Figure represents the stage of the synthesis in which ZnO nanowires synthesized on a thick polycrystalline ZnO layer on a Si substrate have been coated with Al2O3 and the ZnO partially etched away. When the etching is complete, Al2O3 nanotubes remain.
引用
收藏
页码:422 / +
页数:5
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