The influence of different ratio of Ar and C6H6 gases and ion bombardment on the growth rate and sp3 bonds content in DLC-coatings synthesized in RF discharge

被引：2

作者：

Omarov, A. ^{[1
]}

Kalinichenko, A. ^{[1
]}

Strel'nitskij, V. ^{[1
]}

Nasieka, I. U. ^{[2
,3
]}

Danylenko, I. ^{[2
]}

Boyko, M. ^{[2
]}

Sabov, T. ^{[2
]}

机构：

[1] Nat Sci Ctr Kharkov Inst Phys & Technol, 1 Akad Skaya Str, UA-61108 Kharkov, Ukraine

[2] NAS Ukraine, V Ye Lashkaryov Inst Semicond Phys, 45 Nauki Ave, UA-03028 Kiev, Ukraine

[3] Nat Univ Life & Environm Sci Ukraine, Educ & Res Inst Energet Automat & Energy Efficien, 12 Heroyiv Oborony Str, UA-03041 Kiev, Ukraine

来源：

PHYSICS LETTERS A | 2022年 / 443卷

基金：

新加坡国家研究基金会;

关键词：

DLC coatings; Deposition rate; sp(3) bonds concentration; Raman scattering; Photoluminescence; XPS; DIAMOND-LIKE CARBON; NANOCRYSTALLINE DIAMOND; RAMAN-SPECTROSCOPY; FILMS; PHOTOLUMINESCENCE; LUMINESCENCE; HYDROGEN; ORIGIN; XPS;

D O I：

10.1016/j.physleta.2022.128221

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

The radio-frequency discharge growth of diamond-like carbon coatings from the Ar + C6H6 gas was theoretically analyzed with the aim to evaluate the role of Ar+ ions and C6H6+ ionized molecules bombardment on the growth rate and sp(2)/sp(3) carbon phase composition. It has been shown that the growth rate changes nonlinearly with the increase of argon content in the gas. Firstly, it increases from 1.9 mu m/h at P-Ar/(P-Ar+ P-benzol) = 0.033 up to 2.15 mu m/h at P-Ar/(P-Ar+ P-benzol) = 0.5 with further rapid decrease down to 0.57 mu m/h at P-Ar/(P-Ar+ P-benzol) = 0.967. By using theoretical calculations as well as experimental methods it has been shown that sp(3) content in the coatings increases within the range 0.31... 0.41with increase in the relative partial pressure of argon. (c) 2022 The Author(s). Published by Elsevier B.V. This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/).

引用

页数：8