Synthesis by aerosol assisted chemical vapor deposition and microstructural characterization of PbTiO3 thin films

被引：6

作者：

Ramos-Cano, J. ^{[1
]}

Hurtado-Macias, A. ^{[1
]}

Antunez-Flores, W. ^{[1
]}

Fuentes-Cobas, L. ^{[1
]}

Gonzalez-Hernandez, J. ^{[1
]}

Amezaga-Madrid, P. ^{[1
]}

Miki-Yoshida, M. ^{[1
]}

机构：

[1] Ctr Invest Mat Avanzados SC, Lab Nacl Nanotecnol, Chihuahua 31109, Mexico

来源：

THIN SOLID FILMS | 2013年 / 531卷

关键词：

Ferroelectrics; Aerosol-assisted chemical vapor deposition; Lead titanate; Thin films; X-ray diffraction; Scanning electron microscopy; Transmission electron microscopy; ELECTRICAL-PROPERTIES; SPRAY-PYROLYSIS; PB(ZR; TI)O-3; PLASMA; GROWTH; NANO;

D O I：

10.1016/j.tsf.2013.01.021

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin films of PbTiO3 were deposited onto (001) silicon single-crystal substrates by aerosol assisted chemical vapor deposition method at different temperatures, using organometallic precursors. With the objective of stabilizing and homogenizing the perovskite phase, the films were annealed at 800 degrees C, in a Pb-rich atmosphere, for 4 and 6 h. The evolution of compositions and microstructure of the films was characterized before and after annealing, by grazing incidence X-ray diffraction, two-dimensional detection of grazing incidence diffraction with synchrotron radiation, scanning electron microscopy and high resolution transmission electron microscopy. X-ray diffraction results showed that the crystalline structure of optimized PbTiO3 films corresponded to a tetragonal perovskite-type, with lattice parameters a=0.387(4) nmand c=0.406(4) nm. In addition, the inverse pole figure of the fiber texture representation, had a Gaussian (1, 1, 0) component and distribution width Omega=15 degrees. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：179 / 184

页数：6

共 50 条

[1] METALORGANIC CHEMICAL VAPOR-DEPOSITION OF PBTIO3 THIN-FILMS
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