Novel Method of keeping Constant Temperature in Nano Actuator Performance Measurement

To guarantee the accuracy of nanometer displacement measurement, the high-precision control on the temperature of measuring environment must be carried out. In order to meet the practical needs of nanometer displacement measurement, a new concept which is constant temperature time window has been brought forward, as well as a low cost but high-precision project based on the concept. Preliminary research indicates that the realization of 0.001 degrees C constant temperature precision and one-minute measurement interval is easy as long as the cover has good sealing performance even with common adiabatic materials. The measured static characteristics of the great-driving-force and high-rigidity nano actuator prototype show that the control system based on constant temperature time window principle mentioned in this paper could meet the practical needs of nanometer displacement measurement.