Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer

被引：19
|
作者：
Shimizu, Yuki [1 ]
Aihara, Ryo [1 ]
Ren, Zongwei [1 ]
Chen, Yuan-Liu [1 ]
Ito, So [1 ]
Gao, Wei [1 ]
机构：
[1] Tohoku Univ, Dept Finemech, Aoba Ku, 6-6-01 Aramaki Aza Aoba, Sendai, Miyagi 9808579, Japan
来源：
OPTICS EXPRESS | 2016年 / 24卷 / 24期
基金：
日本学术振兴会;
关键词：
INTERFERENCE LITHOGRAPHY; SURFACE ENCODER; FABRICATION; TECHNOLOGY; GRATINGS; STAGE;
D O I：
10.1364/OE.24.027521
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
This paper presents a detailed analysis on the influence of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer, which can fabricate two-dimensional grating structures in a single exposure. In an ideal condition, defect-free two-dimensional grating structures can be fabricated by the interferometer. However, in a real case, visible stripes caused by misalignment errors of the optical components in the interferometer always appear on the fabricated grating structures. In this paper, theoretical analysis and experiments are carried out to analyze the influences of the misalignment errors of the optical components in the orthogonal two-axis Lloyd's mirror interferometer. (C) 2016 Optical Society of America
引用
收藏
页码：27521 / 27535
页数：15
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