Atomic Layer Deposition of Gallium-Doped Zinc Oxide Transparent Conducting Oxide films

被引：4
|
作者：
Chalker, Paul R. [1 ]
Marshall, Paul A. [1 ]
Romani, Simon [1 ]
Rosseinsky, Matthew J. [2 ]
Rushworth, Simon [3 ]
Williams, Paul A. [3 ]
Buckett, John [4 ]
McSporran, Neil [4 ]
Ridealgh, John [4 ]
机构：
[1] Univ Liverpool, Mat Sci & Engn, Liverpool L69 3BX, Merseyside, England
[2] Univ Liverpool, Dept Chem, Liverpool L69 7ZD, Merseyside, England
[3] SAFC Hitech, Wirral, Merseyside CH62 3QF, England
[4] Pilkington Technol Management Ltd, Ormskrik, Lancs L40 5UF, England
来源：
TRANSPARENT CONDUCTING OXIDES AND APPLICATIONS | 2011年 / 1315卷
关键词：
D O I：
10.1557/opl.2011.711
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Thin transparent conducting oxide (TCO) films of gallium-doped zinc oxide have been deposited on glass substrates by atomic layer deposition (ALD) using diethyl zinc, triethyl gallium and water vapour as precursors. The gallium-doped zinc oxide films were deposited over the temperature range 100-350 degrees C. Transmission electron microscopy reveals that the as-deposited films are polycrystalline in character. The electrical resistivity of the gallium-doped zinc oxide films was evaluated using four-point probe and contactless measurement methods as a function of film thickness. The lowest sheet resistance of 16 Omega/square was measured from a film thickness of 400nm and a gallium content of 5 atomic percent. The electron Hall mobility of this film was 12.3 cm(2)/Vs. The visible transmittance of the films was 78% with a haze of 0.2%.
引用
收藏
页码：39 / 44
页数：6
相关论文
共 50 条
  • [1] Preparation, structure and optical properties of transparent conducting gallium-doped zinc oxide thin films
    Gu, J. H.
    Lu, Z.
    Long, L.
    Zhong, Z. Y.
    Yang, C. Y.
    Hou, J.
    MATERIALS SCIENCE-POLAND, 2015, 33 (03): : 470 - 481
  • [2] Study of Gallium-Doped Zinc Oxide Thin Films Processed by Atomic Layer Deposition and RF Magnetron Sputtering for Transparent Antenna Applications
    Chemin, Jean-Baptiste
    Adjeroud, Noureddine
    Kovacova, Veronika
    Glinsek, Sebastjan
    Valle, Nathalie
    El Hachemi, Mohamed
    Girod, Stephanie
    Bouton, Olivier
    Lunca-Popa, Petru
    Maris, Jerome Polesel
    ACS OMEGA, 2023, : 5475 - 5485
  • [3] Highly stable transparent and conducting gallium-doped zinc oxide thin films for photovoltaic applications
    Fortunato, E.
    Raniero, L.
    Silva, L.
    Goncalves, A.
    Pimentel, A.
    Barquinha, P.
    Aguas, H.
    Pereira, L.
    Goncalves, G.
    Ferreira, I.
    Elangovan, E.
    Martins, R.
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2008, 92 (12) : 1605 - 1610
  • [4] Gallium-Doped Zinc Oxide Nanostructures for Tunable Transparent Thermoelectric Films
    Wang, Xizu
    Huang, Xiaohu
    Wong, Zicong Marvin
    Suwardi, Ady
    Zheng, Yun
    Wei, Fengxia
    Wang, Shijie
    Tan, Teck Leong
    Wu, Gang
    Zhu, Qiang
    Tanoto, Hendrix
    Ong, Kian Soo
    Yang, Shuo-Wang
    Yan, Alex Qingyu
    Xu, Jianwei
    ACS APPLIED NANO MATERIALS, 2022, 5 (06) : 8631 - 8639
  • [5] Gallium-doped zinc oxide films as transparent electrodes for organic solar cell applications
    Bhosle, V.
    Prater, J.T.
    Yang, Fan
    Burk, D.
    Forrest, S.R.
    Narayan, J.
    Journal of Applied Physics, 2007, 102 (02):
  • [6] Gallium-doped zinc oxide films as transparent electrodes for organic solar cell applications
    Bhosle, V.
    Prater, J. T.
    Yang, Fan
    Burk, D.
    Forrest, S. R.
    Narayan, J.
    JOURNAL OF APPLIED PHYSICS, 2007, 102 (02)
  • [7] Gallium-doped Magnesium Zinc Oxide (GMZO) Transparent Conducting Oxide Layers for CdTe Thin-film Photovoltaics
    Kephart, Jason M.
    Sampath, W. S.
    2015 IEEE 42ND PHOTOVOLTAIC SPECIALIST CONFERENCE (PVSC), 2015,
  • [8] Gallium-Doped Zinc Oxide Nanoparticle Thin Films as Transparent Electrode Materials with High Conductivity
    Nishi, Yasutaka
    Kasai, Yuki
    Suzuki, Ryoko
    Matsubara, Masaki
    Muramatsu, Atsushi
    Kanie, Kiyoshi
    ACS APPLIED NANO MATERIALS, 2020, 3 (10): : 9622 - 9632
  • [9] Role of oxygen for highly conducting and transparent gallium-doped zinc oxide electrode deposited at room temperature
    Wong, L. M.
    Chiam, S. Y.
    Huang, J. Q.
    Wang, S. J.
    Pan, J. S.
    Chim, W. K.
    APPLIED PHYSICS LETTERS, 2011, 98 (02)
  • [10] ZnO as Transparent Conducting Oxide by Atomic Layer Deposition
    Sinha, Soumyadeep
    Sarkar, Shaibal K.
    2013 IEEE 39TH PHOTOVOLTAIC SPECIALISTS CONFERENCE (PVSC), 2013, : 1183 - 1186
12345