A combined ElectroWetting On Dielectrics superhydrophobic platform based on silicon micro-structured pillars

被引：3
|
作者：
Accardo, Angelo [1 ,2 ]
Gentile, Francesco [1 ,2 ]
Coluccio, Maria Laura [1 ,2 ]
Mecarini, Federico [1 ]
De Angelis, Francesco [1 ]
Di Fabrizio, Enzo [1 ,2 ]
机构：
[1] Ist Italiano Tecnol, Nanostruct Dept, I-16163 Genoa, Italy
[2] Magna Graecia Univ Catanzaro, Ctr Bionanotechnol & Engn Med, I-88100 Catanzaro, Italy
来源：
MICROELECTRONIC ENGINEERING | 2012年 / 98卷
关键词：
Superhydrophobicity; EWOD; Silicon; Micropillars; Micromanipulator; X-RAY; CALCIUM-CARBONATE; SURFACES; LITHOGRAPHY; DROPLETS; WATER;
D O I：
10.1016/j.mee.2012.07.028
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A simple and ready to use approach for combining silicon superhydrophobic surfaces with ElectroWetting On Dielectrics (EWOD) phenomenon is presented. The substrate is fabricated using a two-phases process, where a first optical lithography step is used to define the position of the micro-pillars and a second one exploits the characteristics of reactive ion etch Bosch technique. The fabricated substrate has been then coupled with a micro-manipulator tip to show the local changes mechanism of contact angle by applying very low DC voltages in the range from 5 to 30 V. The device can be of interest for a wide variety of microfluidics applications related to the biomedical field. (C) 2012 Elsevier B.V. All rights reserved.
引用
收藏
页码：651 / 654
页数：4
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