Mathematical modelling of the feed rod shape in floating zone silicon crystal growth

被引：3
|
作者：
Plate, M. [1 ]
Krauze, A. [1 ]
Virbulis, J. [1 ]
机构：
[1] Univ Latvia, Fac Math & Phys, Zellu 23, Riga, Latvia
来源：
JOURNAL OF CRYSTAL GROWTH | 2017年 / 457卷
关键词：
Computer simulation; Heat transfer; Floating zone technique; Single crystal growth; Semiconducting silicon; 3D;
D O I：
10.1016/j.jcrysgro.2016.03.044
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
A three-dimensional (3D) transient multi-physical model of the feed rod melting in the floating zone (FZ) silicon single-crystal growth process is presented. Coupled temperature, electromagnetic (EM), and melt film simulations are performed for a 4 inch FZ system, and the time evolution of the open melting front is studied. The 3D model uses phase boundaries and parameters from a converged solution of a quasi stationary axisymmetric (2D) model of the FZ system as initial conditions for the time dependent simulations. A parameter study with different feed rod rotation, crystal pull rates and widths of the inductor main slit is carried out to analyse their influence on the evolution of the asymmetric feed rod shape. The feed rod rotation is shown to have a smoothing effect on the shape of the open melting front. (C) 2016 Elsevier B.V. All rights reserved.
引用
收藏
页码：85 / 91
页数：7
相关论文
共 50 条
  • [1] 3D SIMULATION OF FEED ROD MELTING IN FLOATING ZONE SILICON SINGLE CRYSTAL GROWTH
    Plate, M.
    Krauze, A.
    Virbulis, J.
    MAGNETOHYDRODYNAMICS, 2015, 51 (01): : 25 - 35
  • [2] Validation of a 3D mathematical model for feed rod melting during floating zone Si crystal growth
    Plate, Matiss
    Dadzis, Kaspars
    Krauze, Armands
    Menzel, Robert
    Virbulis, Janis
    JOURNAL OF CRYSTAL GROWTH, 2019, 521 : 46 - 49
  • [3] Analytical modelling of floating zone crystal growth
    Martínez, I
    Meseguer, J
    Perales, JM
    IMPACT OF THE GRAVITY LEVEL ON MATERIALS PROCESSING AND FLUID DYNAMICS, 2002, 29 (04): : 569 - 574
  • [4] Three-dimensional modelling of thermal stress in floating zone silicon crystal growth
    Plate, Matss
    Krauze, Armands
    Virbulis, Janis
    VIII INTERNATIONAL SCIENTIFIC COLLOQUIUM ON MODELLING FOR MATERIALS PROCESSING, 2018, 355
  • [5] Numerical modelling of melting front structures during floating zone silicon crystal growth
    Surovovs, Maksims
    Sjomkane, Maija
    Virbulis, Janis
    Ratnieks, Gundars
    JOURNAL OF CRYSTAL GROWTH, 2024, 643
  • [6] CHUCK DESIGN FOR HOLDING A SILICON ROD IN FLOATING ZONE CRYSTAL GROWING
    HEMMAT, N
    MACDONALD, AL
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1961, 32 (05): : 601 - &
  • [7] Hydrodynamical aspects of the floating zone silicon crystal growth process
    Surovovs, Kirils
    Muiznieks, Andris
    Sabanskis, Andrejs
    Virbulis, Janis
    JOURNAL OF CRYSTAL GROWTH, 2014, 401 : 120 - 123
  • [8] Application of enthalpy model for floating zone silicon crystal growth
    Krauze, A.
    Bergfelds, K.
    Virbulis, J.
    JOURNAL OF CRYSTAL GROWTH, 2017, 474 : 16 - 23
  • [9] 3D numerical simulation of free surface shape during the crystal growth of floating zone (FZ) silicon
    Han, Xue-Feng
    Liu, Xin
    Nakano, Satoshi
    Harada, Hirofumi
    Miyamura, Yoshiji
    Kakimoto, Koichi
    JOURNAL OF CRYSTAL GROWTH, 2018, 483 : 269 - 274
  • [10] CONTROL OF HEAT-FLOW TO FEED ROD IN FLOATING ZONE SYSTEM
    OTANI, S
    TANAKA, T
    ISHIZAWA, Y
    JOURNAL OF CRYSTAL GROWTH, 1988, 87 (2-3) : 175 - 179
12345