Radiation resistant innovative 3D pixel sensors for the CMS upgrade at the High Luminosity LHC

Results of an extensive R&D program aiming at radiation hard, small pitch, 3D pixel sensors are reported. The CMS experiment is supporting this R&D in the scope of the Inner Tracker upgrade for the High Luminosity phase of the CERN Large Hadron Collider (HL-LHC). In the HL-LHC the Inner Tracker will have to withstand an integrated fluence up to 2.3 x 1016 neq/cm(2). A small number of 3D sensors were interconnected with the RD53A readout chip, which is the first prototype of 65 nm CMOS pixel readout chip designed for the HL-LHC pixel trackers. In this paper results obtained in beam tests before and after irradiation are reported. The irradiation of a single chip module was performed up to a maximum equivalent fluence of about 1 x 1016 neq/cm(2). The analysis of the collected data shows excellent performance: the spatial resolution in not irradiated sensors can reach about 3 to 5 mu m, for inclined tracks, depending on the pixel pitch. The measured hit detection efficiencies are close to 99% measured both before and after the above mentioned irradiation fluence.