230 nm resolution 10 keV X-ray imaging transmission microscope with parallel beam illumination

被引：5
|
作者：
Kagoshima, Y
Ibuki, T
Yokoyama, Y
Takai, K
Tsusaka, Y
Matsui, J
机构：
[1] Himeji Inst Technol, Fac Sci, Ako, Hyogo 6781297, Japan
[2] Japan Synchrotron Radiat Res Inst, Sayo, Hyogo 6795198, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2002年 / 41卷 / 01期
关键词：
X-ray microscope; phase zone plate; high resolution; imaging microscope; synchrotron radiation; hard X-ray;
D O I：
10.1143/JJAP.41.412
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The spatial resolution of an imaging transmission hard X-ray microscope has been greatly enhanced by the use of all X-ray phase zone plate with a numerical aperture five times larger than the previous one [Y. Kagoshima, T. Ibuki, K. Takai, Y. Yokoyama, N. Miyamoto, Y. Tsusaka and J. Matsui: Jpn. J. Appl. Phys. 39 (2000) L433]. An experiment was carried out at the photon energy of 10 keV to evaluate the performance of the microscope. It was confirmed that the spatial resolution was 230 nm and that a Line-and-space pattern as fine as 100 nm could be imaged.
引用
收藏
页码：412 / 413
页数：2
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