Investigation of the influence of the parameters of a pulsed power source on the properties of a magnetron's high-power gas discharge

被引：0
|
作者：
Borzykin, T. S. [1 ]
Karzin, V. V. [1 ]
Ivanov, D. A. [1 ]
Lullin, Z. G. [1 ]
Reznikov, R., I [1 ]
机构：
[1] St Petersburg Electrotech Univ LETI, St Petersburg 197376, Russia
来源：
26TH INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY | 2019年 / 1313卷
基金：
俄罗斯基础研究基金会;
关键词：
IMPULSE; TARGET;
D O I：
10.1088/1742-6596/1313/1/012007
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The paper presents the results of an experimental study of the emission spectra of a gas discharge during high-power impulse magnetron sputtering. The influence of the repetition frequency and duration of current pulses on the intensity of the spectral lines of various particles is shown. The parameters of the gas-discharge plasma during HiPIMS and at a direct current were also compared.
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收藏
页数：5
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