Super Low Velocity Thin Film Gratings/Piezoelectric Substrate Structure With High Reflectivities and Applications for SAW Resonator Filters, Unidirectional SAW Transducers and Bulk Acoustic Resonator Filters

被引：0
|
作者：
Yamanouchi, Kazuhiko [1 ]
Satoh, Yusuke [1 ]
机构：
[1] Tohoku Inst Technol, Sendai, Miyagi 9828577, Japan
来源：
2006 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-5, PROCEEDINGS | 2006年
关键词：
D O I：
10.1109/ULTSYM.2006.307
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, the propagation characteristics and reflectivities of TeO2 grating/128 degrees Y-X LiNbO3, 36 degrees Y-X LiTaO3 and 5 degrees Y-X LiNbO3 are analyzed and applied to resonators, conventional and dispersive unidirectional transducers and solidaly mounted bulk wave resonators. Theoretical results of thin film gratings show the large reflectivity, for examples, thin film gratings gives r=0.95 at the thickness of H/lambda=0.01., for 128 degrees Y-X LiNbO3. The experimental results of IDT resonator of thin film(H/lambda=0.01)/Al/128 degrees Y-X LiNbO3 with N=80,W=20 lambda have admittance of -5dB, compared with -14dB without thin films. The experimental unidirectional transducer filter using thin film(H/lambda=0.015)/Al/128 degrees Y-X LiNbO3 showed the 1.6dB insertion loss at 500MHz without matching. Also flat wide band low loss nondispersive filter characteristics are developed using dispersive unidirectional IDT. Finally, thin film bulk acoustic wave resonator (SMR) of ZnO/W/TeO2 thin film//W/TeO2 thin film/Si substrate structure showed the 30dB at resonance and -60dB at anti-resonance.
引用
收藏
页码：1197 / 1200
页数：4
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