Sensitivity of micromechanical actuation on amorphous to crystalline phase transformations under the influence of Casimir forces

被引：42

作者：

Sedighi, M. ^{[1
]}

Broer, W. H. ^{[1
]}

Palasantzas, G. ^{[1
]}

Kooi, B. J. ^{[1
]}

机构：

[1] Univ Groningen, Zernike Inst Adv Mat, NL-9747 AG Groningen, Netherlands

来源：

PHYSICAL REVIEW B | 2013年 / 88卷 / 16期

关键词：

PULL-IN PARAMETERS; MICROELECTROMECHANICAL SYSTEMS; ELECTROSTATIC ACTUATORS; MICROSCOPY; PHYSICS; RANGE; MODEL; MEMS;

D O I：

10.1103/PhysRevB.88.165423

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Amorphous to crystalline phase transitions in phase change materials (PCM) can have strong influence on the actuation of microelectromechanical systems under the influence of Casimir forces. Indeed, the bifurcation curves of the stationary equilibrium points and the corresponding phase portraits of the actuation dynamics between gold and AIST (Ag5In5Sb60Te30) PCM, where an increase of the Casimir force of up similar to 25% has been measured upon crystallization, show strong sensitivity to changes of the Casimir force as the stiffness of the actuating component decreases and/or the effective interaction area of the Casimir force increases, which can also lead to stiction. However, introduction of intrinsic energy dissipation (associated with a finite quality factor of the actuating system) can prevent stiction by driving the system to attenuated motion towards stable equilibrium depending on the PCM state and the system quality factor.

引用

页数：5

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