NANO POROUS SILICON MICROCAVITY OPTICAL BIOSENSOR DEVICE FOR GLUCOSE DETECTION

被引:0
|
作者
Patel, P. N. [1 ]
Mishra, V. [1 ]
Panchal, A. K. [1 ]
机构
[1] SV Natl Inst Technol, Dept Elect Engn, Surat 395007, Gujarat, India
关键词
Nano Porous silicon; Microcavity Structures; Optical Sensor; Glucose Biosensor Device;
D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Recently, Porous Silicon (PS) is emerged as a new, unique and promising nano material for the optoelectronic devices and the sensing applications. In this study, rapid, sensitive, and reversible sensing of glucose level using one dimensional (1D) Porous Silicon (PS) Microcavity (MC) sensor device is successfully demonstrated. 1D-PSMC sensor device structure was fabricated by electrochemical anodization of crystalline silicon wafer and proposed as a large surface area matrix for optical sensing of glucose concentrations. The refractive index of the 1D-PSMC structure is tuned by changing current density and the thickness by etching time. Wavelength shift (Delta lambda) in the measured reflectance spectra of prepared structures were analyzed for the detection of the glucose concentrations in the porous structure. Sensor device showed excellent sensing ability and good linear relation between the different concentrations of glucose and the wavelength shift. It was also observed that, the photonic resonance dip in the reflectance spectra of the 1D-PSMC sensor device promptly returned to their original states after removal of glucose molecules from the porous structure. This is a very good quality of these structures, as it is helpful in the development of reversible sensing devices.
引用
收藏
页码:973 / 982
页数:10
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