Miniature all-fiber force sensor

被引:16
|
作者
Pevec, Simon [1 ]
Donlagic, Denis [1 ]
机构
[1] Univ Maribor, Fac Elect Engn & Comp Sci, Koroska Cesta 46, SI-2000 Maribor, Slovenia
关键词
TENSION;
D O I
10.1364/OL.401690
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A miniature all-fiber Fabry-Perot sensor for measurement of force is presented in this Letter. The sensor consists of a thin silica diaphragm created at the tip of the fiber. The central part of the diaphragm is extended into a silica pole, which is ended with a round-shaped probe or a sensing cylinder apt for asserting measured force. The entire sensor is made of silica glass and has a cylindrical shape with a length of about 800 Am and a diameter of about 105 mu m. Force sensing resolution of about 0.6 mu N was demonstrated experimentally while providing an unambiguous sensor measurement range of about 0.6 mN. The sensor is shown for measurements of surface tension of liquids and biological samples examination. (C) 2020 Optical Society of America
引用
收藏
页码:5093 / 5096
页数:4
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