Research on technology of digital knife-edge test

被引：0
|
作者：
Zhang, J [1 ]
Zhang, RZ [1 ]
Cai, BW [1 ]
Liu, PL [1 ]
机构：
[1] Sichuan Univ, Photon Sci & Technol Dept, Chengdu 610064, Peoples R China
来源：
2ND INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: OPTICAL TEST AND MEASUREMENT TECHNOLOGY AND EQUIPMENT, PTS 1 AND 2 | 2006年 / 6150卷
关键词：
surface characterization testing; digital knife-edge; quantitative analysis; tilt error;
D O I：
10.1117/12.678088
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
In order to measure the quantitative surface characteristics of large aperture optics conveniently, a digital knife-edge is formed based on the combination of traditional knife-edge, CCD image processing and computer aided calculation, which includes knife-edge positioning with image processing and introduces parameter PSD to describe frequency spectrum. Quantitative digital measurement of knife-edge is realized and surface characteristics of diameter 150mm and diameter 125mm spherical mirror is obtained with an accuracy up to 0.12 lambda (lambda =532nm). In the meantime, the testing error, especially the tilt error is analyzed. Compared with testing results of interferometer, the digital knife-edge testing technology is verified available and the data useful for calculating geometric aberration and provides theoretical bases for surface modifying.
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页数：5
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