Predictive Trajectory Based Inverse Control of AFM Scanning Method

The paper proposes a predictive trajectory based inverse control method, which is applied to AFM scanning process. Specifically, considering the features of atomic force microscope (AFM) control system, in which the topography of sample can be seen as system disturbance, a trajectory predictor based on two axes is designed, and the feed-forward/feedback inverse control strategy is employed to eliminate this disturbance. Additionally, a stable inverse model is calculated for the non-minimum phase AFM system, which can guarantee the stable performance of this system. Some simulation results show that this method is effective for AFM system, as it can reduce the control errors, enhance the imaging accuracy, improve the transient performance remarkably, and also the damage of sample and tip will be reduced largely.