Synthesis of Si nanowires using Au catalyst accompanied with silicide nanoparticle formation

被引:6
|
作者
Meng, Erchao [2 ]
Li, Wen [2 ]
Nakane, Kaito [1 ]
Shirahashi, Yuya [1 ]
Suzuki, Hiroaki [3 ]
Sato, Yusuke [3 ]
Tatsuoka, Hirokazu [1 ]
机构
[1] Shizuoka Univ, Grad Sch Engn, 3-5-1 Johoku, Hamamatsu, Shizuoka 4328561, Japan
[2] Shizuoka Univ, Grad Sch Sci & Technol, Hamamatsu, Shizuoka 4328011, Japan
[3] Shizuoka Univ, Fac Engn, Hamamatsu, Shizuoka 4328561, Japan
关键词
nanowire; VLS; VSS; facet; GROWTH; LAYERS;
D O I
10.1002/pssc.201300347
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Si nanowires were grown on Si(111) substrates, and the shape modification of the nanowires was demonstrated. With the Au catalyst, the highly symmetric faceted silicide solid particle in the Au-Si eutectic solution was formed on the top of the nanowires, and the solid catalyst defined the shape of the Si nanowire. Namely, the VLS growth mechanism was followed by the VSS growth mechanism, and the modified shaped faceted Si nanowire was formed during the VSS growth. This result makes us to expect to control the shape of the nanowires by the formation of facetted silicide particles grown during the Au catalytic growth. (c) 2013 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
引用
收藏
页码:1789 / 1792
页数:4
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