The Effect of Fe(III)/Fe(II) Redox Couple on Nucleus Density during Cu Electrodeposition Process

被引：6
|
作者：
Qiao, Feng [1 ]
O'Brien, Brendan B. [2 ]
Dunn, Kathleen A. [2 ]
West, Alan C. [1 ]
机构：
[1] Columbia Univ, Dept Chem Engn, New York, NY 10027 USA
[2] SUNY Albany, Coll Nanoscale Sci & Engn, Albany, NY 12203 USA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 2013年 / 160卷 / 06期
关键词：
COPPER ELECTRODEPOSITION; ELECTROCHEMICAL NUCLEATION; THIN-FILM; ADSORPTION; BARRIER; PEG; DESORPTION; ADDITIVES; RUTHENIUM; TRENCHES;
D O I：
10.1149/2.142306jes
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
Achieving high nucleus density is key to the success of direct electrodeposition of copper in small, high-aspect-ratio features. The impact of the Fe(III)/Fe(II) redox couple on the nucleus density during the galvanostatic electrodeposition of copper is investigated. Scanning electron microscopy (SEM) is utilized to observe the copper nuclei on the sample surface. Experimental data show that the addition of the iron redox couple can increase the nucleus density by. a factor of 3 to 5. This enhancement however, is not strongly correlated with an increase in overpotential. Additionally, CuSO4 concentration, substrate material, suppressor type and current density have also been shown to influence the nucleus density. (C) 2013 The Electrochemical Society. All rights reserved.
引用
收藏
页码：D271 / D278
页数：8
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