Laser Doppler sensor employing a single fan-shaped interference fringe system for distance and shape measurement of laterally moving objects

被引:11
|
作者
Pfister, Thorsten [1 ]
Buettner, Lars [1 ]
Czarske, Juergen [1 ]
机构
[1] Tech Univ Dresden, Fac Elect Engn & Informat Technol, Chair Measurement & Testing Technol, D-01069 Dresden, Germany
关键词
PROFILE SENSOR; TIP CLEARANCE; POSITION; VELOCITY; UNCERTAINTY; RESOLUTION; SURFACES; ROTOR;
D O I
10.1364/AO.48.000140
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
For monitoring the position and shape of fast moving and, especially, rotating objects such as turbo machine rotors, contactless and compact sensors with a high measurement rate as well as high precision are required. We present for the first time, to the best of our knowledge, a novel laser Doppler sensor employing a single fan-shaped interference fringe system, which allows measuring for the position and shape of fast moving solid bodies with known tangential velocity. It is shown theoretically as well as experimentally that this sensor offers concurrently high position resolution and high temporal resolution in contrast to conventional measurement techniques, since its measurement uncertainty is, in principle, independent of the object velocity. Moreover, it can be built very compact, because it features low complexity. To prove its operational capability and its potential for practical applications, radial and axial shape measurements of rotating bodies are demonstrated in comparison with triangulation. An average position resolution of about 2 mu m could be achieved. (C) 2008 Optical Society of America
引用
收藏
页码:140 / 154
页数:15
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