Micro electro discharge machining as a technology in micromachining

被引：0
|
作者：
Ehrfeld, W [1 ]
Lehr, H [1 ]
Michel, F [1 ]
Wolf, A [1 ]
机构：
[1] INST MICROTECHNOL MAINZ GMBH,D-55129 MAINZ,GERMANY
来源：
MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY II | 1996年 / 2879卷
关键词：
micro electro discharge machining; LIGA; microreactors; micro injection moulding;
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：332 / 337
页数：6
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