Characterization of guided modes excited by periodically poled transducers on Si

被引：0

作者：

Courjon, E. ^{[1
]}

Ulliac, G. ^{[1
]}

Garcia, J. ^{[1
]}

Petrini, V. ^{[1
]}

Daniau, W. ^{[1
]}

Ballandras, S. ^{[1
]}

Hauden, J. ^{[2
]}

机构：

[1] Inst FEMTO ST, Besancon, France

[2] Photline Technologies, Besancon, France

来源：

2008 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM, VOLS 1 AND 2 | 2008年

关键词：

D O I：

10.1109/FREQ.2008.4623071

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains on lithium niobate. The fabrication of test devices operating in the range 17 - 665 MHz has been achieved on 3 '' 500 put thick wafers. These devices have been bonded on silicon and lapped down to a few tens of microns. Guided elliptic as well as partially guided longitudinal modes are excited, yielding phase velocity of about 3800 and 7000 m.s(-1) respectively. The experimental responses are compared to the theoretical results. Finally, the temperature coefficients of frequency are measured and simulated by introducing temperature variations in our FEA/BEM code showing a good agreement between both results.

引用

页码：604 / +

页数：2

共 50 条

[1] Acoustic resonator based on periodically poled transducers: Fabrication and characterization
Bassignot, F.
Courjon, E.
Ulliac, G.
Ballandras, S.
Lesage, J. -M.
Petit, R.
[J]. JOURNAL OF APPLIED PHYSICS, 2012, 112 (07)
[2] Acoustic resonator based on periodically poled transducers: Concept and analysis
Bassignot, F.
Courjon, E.
Ulliac, G.
Ballandras, S.
Lesage, J-M
Petit, R.
[J]. JOURNAL OF APPLIED PHYSICS, 2012, 111 (06)
[3] Fabrication of periodically poled domains transducers on LiNbO3
Courjon, E.
Bodin, N.
Lengaigne, G.
Gauthier-Manuel, L.
Daniau, W.
Ballandras, S.
Paruch, P.
Triscone, J. M.
Hauden, J.
[J]. PROCEEDINGS OF THE 2006 IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EXPOSITION, VOLS 1 AND 2, 2006, : 831 - +
[4] Numerical Simulation on Periodically Poled Lithium Niobate Transducers on Rotated Cuts
Matic, Alexandre
Baron, Thomas
Bassignot, Florent
[J]. PROCEEDINGS OF THE 2019 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EUROPEAN FREQUENCY AND TIME FORUM (EFTF-IFCS 2019), 2019,
[5] Optical characterization of periodically-poled KTP
Peeters, W. H.
van Exter, M. P.
[J]. NANOPHOTONICS II, 2008, 6988
[6] Guided wave optics in periodically poled KTP: quadratic nonlinearity and prospects for attosecond jitter characterization
Nejadmalayeri, Amir H.
Wong, Franco N. C.
Roberts, Tony D.
Battle, Philip
Kaertner, Franz X.
[J]. OPTICS LETTERS, 2009, 34 (16) : 2522 - 2524
[7] A nondestructive characterization system of periodically poled crystals
Chen, Huaixi
Zhou, Huang
Chen, Liyuan
Zou, Xiaolin
Miao, Long
Feng, Xinkai
Li, Guangwei
Liang, Wanguo
[J]. 2015 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS, 2015, 9618
[8] Optical characterization of periodically-poled KTiOPO4
Peeters, W. H.
van Exter, M. P.
[J]. OPTICS EXPRESS, 2008, 16 (10) : 7344 - 7360
[9] Fabrication and Characterization of Zirconium - doped Periodically Poled Lithium Niobate
Ciampolillo, M. V.
Pozza, G.
Bazzan, M.
Argiolas, N.
Zaltron, A.
Bacci, L.
Sada, C.
Nava, G.
Minzioni, P.
[J]. 2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS EUROPE AND INTERNATIONAL QUANTUM ELECTRONICS CONFERENCE (CLEO EUROPE/IQEC), 2013,
[10] Nondestructive imaging and characterization of ferroelectric domains in periodically poled crystals
Eng, LM
Guntherodt, HJ
Rosenman, G
Skliar, A
Oron, M
Katz, M
Eger, D
[J]. JOURNAL OF APPLIED PHYSICS, 1998, 83 (11) : 5973 - 5977

← 1 2 3 4 5 →