Synthesis of Nd-Fe-B thin films with high coercive force by cosputtering

被引：18
|
作者：
Piramanayagam, SN
Matsumoto, M
Morisako, A
Takei, S
机构：
[1] Takei Department of Information Engineering, Shinshu University, Nagano 380
来源：
IEEE TRANSACTIONS ON MAGNETICS | 1997年 / 33卷 / 05期
关键词：
D O I：
10.1109/20.619524
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
NdFeB thin films were prepared by cosputtering of the individual elements and the magnetic properties were studied as a function of the concentration of Nd and B in the Alms. The dependence of coercive force, saturation magnetization and the energy product (B(r)xH(c)) on the composition are presented by three dimensional diagrams. High coercive force and high energy product was observed at Nd concentrations slightly higher than the stoichiometric composition. For a fixed composition, a dependence of coercive force as a function of thickness of the film was observed. The microstructure of the films also showed a variation as a function of thickness.
引用
收藏
页码：3643 / 3645
页数：3
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