Robust Cu Atom Switch with over-400°C thermally tolerant Polymer-solid Electrolyte (TT-PSE) for Nonvolatile Programmable Logic

被引：0

作者：

Okamoto, K. ^{[1
]}

Tada, M. ^{[1
]}

Banno, N. ^{[1
]}

Iguchi, N. ^{[1
]}

Hada, H. ^{[1
]}

Sakamoto, T. ^{[1
]}

Miyamura, M. ^{[1
]}

Tsuji, Y. ^{[1
]}

Nebashi, R. ^{[1
]}

Morioka, A. ^{[1
]}

Bai, X. ^{[1
]}

Sugibayashi, T. ^{[1
]}

机构：

[1] NEC Corp Ltd, 34 Miyukigaoka, Tsukuba, Ibaraki 3058501, Japan

来源：

2016 IEEE SYMPOSIUM ON VLSI TECHNOLOGY | 2016年

关键词：

Atom switch; Crossbar; Nonvolatile programmable logic;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A fully 400 degrees C-processed, standard Cu-BEOL compatible, robust Cu atom switch has been developed featuring an over-400 degrees C high thermally tolerant polymer-solid electrolyte (TT-PSE). Hydrocarbons that have weak chemical bindings in the PSE are selectively eliminated in the TT-PSE, resulting in higher thermal stability. The TT-PSE also gives higher breakdown voltage (+1V) with keeping low set voltage (2V) due to the elimination of the fragile hydrocarbon bindings. Data retention characteristics after thermal cycle stress at temperature ranging from -65 to 150 degrees C for 1000 cycles are confirmed for the first time. The developed atom switch is to be a technology enabler of reliable reprogrammable logics for future robotic/vehicle applications at high temperatures.

引用

页数：2