[1] Cytena GmbH, Neuer Messpl 3, D-79108 Freiburg, Germany
[2] Univ Freiburg, Dept Microsyst Engn, Lab MEMS Applicat, IMTEK, Georges Kohler Allee 103, D-79110 Freiburg, Germany
[3] Hahn Schickard, Georges Koehler Allee 103, D-79110 Freiburg, Germany
[4] Univ Freiburg, BIOSS Ctr Biol Signalling Studies, Schanzlestr 18, D-79104 Freiburg, Germany