A Novel Piezoresistive Sensitive Structure for Micromachined High-pressure Sensors

被引：0

作者：

Guo, Xin ^{[1
]}

Hebibul, Rahman ^{[2
]}

Jiang, Zhuangde ^{[1
]}

Zhao, Libo ^{[1
]}

Xu, Tingzhong ^{[1
]}

Zhao, Zhiming ^{[1
]}

Li, Zhikang ^{[1
]}

Xu, Yu ^{[1
]}

Gao, Wendi ^{[1
]}

机构：

[1] Xi An Jiao Tong Univ, Collaborat Innovat Ctr Suzhou Nano Sci & Technol, Int Joint Lab Micronano Mfg & Measurement Technol, State Key Lab Mfg Syst Engn, Xian, Shaanxi, Peoples R China

[2] Xinjiang Vocat & Tech Coll Commun, Sch Automot Mech & Elect Engn, Urumqi, Peoples R China

来源：

2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2017年

基金：

中国国家自然科学基金;

关键词：

piezoresistive sensitive structure; micromachined high pressure; 3D piezoresistive effect; resistance arrangement;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A novel piezoresistive sensitive structure for micromachined high-pressure sensors is proposed. This structure employs several small cavities in a silicon bulk. When high pressure applied on all faces of the bulk, stress emerges between two cavities. The calculation for the variation of the resistance caused by stress in three-dimensional (3D) structure was discussed. According to 3D piezoresistive effect, the performance of the sensitivity and nonlinearity affected by the dimensions of cavity structure had been clarified. The simulation results show the optimized position for the resistance is in lower region. This sensitive structure is suitable for micromachined high-pressure sensors and the performance study set a guideline for designing micromachined high-pressure sensors with multi-cavities working in different range.

引用

页码：728 / 731

页数：4

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