Capacitive micro-sensor for the detection of dextrose

被引:0
|
作者
Humayun, Q. [1 ]
Hashim, U. [1 ]
Kashif, M. [1 ]
机构
[1] Univ Malaysia Perlis, INEE, Nano Struct Lab On Chip Res Grp, Kangar 01000, Perlis, Malaysia
关键词
micro-gap; chrome mask; molarities; dextrose; capacitance; TRANSISTOR; BIOSENSORS;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
This work demonstrates the fabrication and electrical characterization of aluminum micro-gap on silicon substrate. For low cost and time conventional photolithography technique has been applied to fabricate the aluminum micro-gap. The fabricated device was tested for different molarities of dextrose. For the micro-gap fabrication chrome mask was design using AutoCAD software. The size of the fabricated micro-gap was around 81.7 mu m. The electrical measurements were carried out using Alpha high frequency dielectric analyzer. It was observed that when the dextrose concentration varied from 250 mu M to 1 mu M the capacitance value fluctuates from 330nF to 10nF. The limit of detection for the fabricated device was 1 mu M.
引用
收藏
页码:716 / 719
页数:4
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