Simplified analysis of sub-wavelength triangular gratings by simplified modal method

被引：9

作者：

Sridharan, Gayathri ^{[1
]}

Bhattacharya, Shanti ^{[1
]}

机构：

[1] Indian Inst Technol, Ctr NEMS & Nanophoton CNNP, Dept Elect Engn, Madras 600036, Tamil Nadu, India

来源：

APPLIED OPTICS | 2016年 / 55卷 / 34期

关键词：

POLARIZING BEAM SPLITTER; TRANSMISSION GRATINGS; ARBITRARY PROFILE; RELIEF GRATINGS; DIFFRACTION; DEEP; GROOVES; DESIGN;

D O I：

10.1364/AO.55.009712

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

A phase-equivalence of a triangular grating and a "corresponding" blazed structure is proposed. This equivalence is used to simplify the analysis of the grating, which otherwise would require the repetitive application of the simplified modal method to each lamellar grating that constitutes the triangular grating. The concept is used to arrive at an equation for the phase introduced by the triangular grating. The proposed model is verified by finite element simulations. A method of fabricating a triangular grating in quartz is presented. The proposed theory, along with optical testing, can be used as a non-destructive means by which to estimate the height of the triangular grating during the dry etching process. (C) 2016 Optical Society of America

引用

页码：9712 / 9718

页数：7

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