Forced Vibration of Electrically Actuated FGM Micro-Switches

被引：20
|
作者：
Jia, X. L. [1 ]
Yang, J. [2 ]
Kitipornchai, S. [1 ]
Lim, C. W. [1 ]
机构：
[1] City Univ Hong Kong, Dept Bldg & Construct, Hong Kong, Hong Kong, Peoples R China
[2] RMIT Univ, Sch Aerosp Mech & Mfg Engn, Bundoora, Vic 3083, Australia
来源：
PROCEEDINGS OF THE TWELFTH EAST ASIA-PACIFIC CONFERENCE ON STRUCTURAL ENGINEERING AND CONSTRUCTION (EASEC12) | 2011年 / 14卷
关键词：
Forced vibration; Frequency response; Micro-beam; Functionally graded material;
D O I：
10.1016/j.proeng.2011.07.034
中图分类号：
TU [建筑科学];
学科分类号：
0813 ;
摘要：
This paper presents an analytical study on the forced vibration of micro-switches under combined electrostatic, intermolecular forces and axial residual stress. The micro-switch considered in this study is made of non-homogeneous functionally graded material with two material phases. The nonlinear partial differential equation which describes the forced vibration of the micro-beam is derived based on the framework of von Karman-type geometric nonlinearity and Euler-Bernoulli beam theory, and are solved using the method of averaging. The modulations of the amplitude of clamped-clamped micro-switch are obtained. The present results are validated through direct comparisons with published experimental material composition and AC harmonic force on the frequency response characteristics of the micro-switch. (C) 2011 Published by Elsevier Ltd.
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页数：8
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