Micro hot embossing of thermoplastic polymers: a review

被引：183
|
作者：
Peng, Linfa [1 ]
Deng, Yujun [1 ]
Yi, Peiyun [1 ]
Lai, Xinmin [1 ,2 ]
机构：
[1] Shanghai Jiao Tong Univ, State Key Lab Mech Syst & Vibrat, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Shanghai Key Lab Digital Manufacture Thin Walled, Shanghai 200240, Peoples R China
来源：
JOURNAL OF MICROMECHANICS AND MICROENGINEERING | 2014年 / 24卷 / 01期
基金：
上海市科技启明星计划; 中国国家自然科学基金;
关键词：
STRAIN GRADIENT PLASTICITY; LIGHT GUIDE PLATE; STEPPED ROTATING LITHOGRAPHY; ELECTROOSMOTIC FLOW PUMP; SIZE-DEPENDENT BEHAVIOR; X-RAY-LITHOGRAPHY; ON-A-CHIP; NANOIMPRINT LITHOGRAPHY; MECHANICAL-PROPERTIES; ROLL MOLD;
D O I：
10.1088/0960-1317/24/1/013001
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Micro hot embossing of thermoplastic polymers is a promising process to fabricate high precision and high quality features in micro/nano scale. This technology has experienced more than 40 years development and has been partially applied in industrial production. Three modes of micro hot embossing including plate-to-plate, roll-to-plate and roll-to-roll have been successively developed to meet the increasing demand for large-area patterned polymeric films. This review surveys recent progress of micro hot embossing in terms of polymeric material behavior, embossing process and corresponding apparatus. Besides, challenges and innovations in mold fabrication techniques are comprehensively summarized and industrial applications are systematically cataloged as well. Finally, technical challenges and future trends are presented for micro hot embossing of thermoplastic polymers.
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页数：23
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