Kaleidoscopic imaging patterns of complex structures fabricated by laser-induced deformation

被引:27
|
作者
Zhang, Haoran [1 ,2 ]
Yang, Fengyou [1 ,2 ]
Dong, Jianjie [1 ]
Du, Lena [1 ,2 ]
Wang, Chuang [1 ,2 ]
Zhang, Jianming [3 ]
Guo, Chuan Fei [4 ]
Liu, Qian [1 ,3 ,5 ,6 ,7 ]
机构
[1] Chinese Acad Sci, Ctr Excellence Nanosci, CAS Key Lab Nanosyst & Hierarch Fabricat, Natl Ctr Nanosci & Technol, Beijing 100190, Peoples R China
[2] Univ Chinese Acad Sci, Fac Electron & Mat, Beijing 10080, Peoples R China
[3] Chinese Acad Sci, Suzhou Inst Nano Tech & Nano Bion, Suzhou 212213, Peoples R China
[4] South Univ Sci & Technol China, Dept Mat Sci & Engn, Shenzhen 518055, Peoples R China
[5] Nankai Univ, MOE Key Lab Weak Light Nonlinear Photon, Tianjin 300457, Peoples R China
[6] Nankai Univ, TEDA Appl Phys Inst, Tianjin 300457, Peoples R China
[7] Nankai Univ, Sch Phys, Tianjin 300457, Peoples R China
来源
Nature Communications | 2016年 / 7卷
基金
欧盟第七框架计划; 中国国家自然科学基金;
关键词
MICROLENS ARRAYS; SOLAR-CELLS; 3D; METAMATERIAL; LITHOGRAPHY; INTERFACE; SURFACES; PLATFORM; INDEX;
D O I
10.1038/ncomms13743
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Complex surface structures have stimulated a great deal of interests due to many potential applications in surface devices. However, in the fabrication of complex surface micro-/nanostructures, there are always great challenges in precise design, or good controllability, or low cost, or high throughput. Here, we present a route for the accurate design and highly controllable fabrication of surface quasi-three-dimensional (quasi-3D) structures based on a thermal deformation of simple two-dimensional laser-induced patterns. A complex quasi-3D structure, coaxially nested convex-concave microlens array, as an example, demonstrates our capability of design and fabrication of surface elements with this method. Moreover, by using only one relief mask with the convex-concave microlens structure, we have gotten hundreds of target patterns at different imaging planes, offering a cost-effective solution for mass production in lithography and imprinting, and portending a paradigm in quasi-3D manufacturing.
引用
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页数:8
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