Effect of high-voltage pulses on the structure and properties of titanium nitride vacuum-arc coatings

被引:54
|
作者
Sobol', O. V. [1 ]
Andreev, A. A. [2 ]
Grigoriev, S. N. [3 ]
Gorban', V. F. [4 ]
Volosova, M. A. [3 ]
Aleshin, S. V. [3 ]
Stolbovoi, V. A. [2 ]
机构
[1] Natl Tech Univ KhPI, Kharkov, Ukraine
[2] Natl Sci Ctr KhFTI, Kharkov, Ukraine
[3] Moscow State Technol Univ STANKIN MGTU STANKIN, Moscow, Russia
[4] IM Frantsevich Inst Problems Mat Sci, Kiev, Ukraine
关键词
ion implantation; vacuum-arc coatings; titanium nitride; bias potential; high-voltage pulses; structure; hardness; wear resistance; STRESS; DEPOSITION; ENERGY;
D O I
10.1007/s11041-012-9481-8
中图分类号
TF [冶金工业];
学科分类号
0806 ;
摘要
The structure, the stress-strain state, and the mechanical properties (hardness and wear resistance) of titanium nitride coatings deposited on a substrate by a vacuum-arc method at constant (from -5 V to -230 V) and high-frequency pulse (-1000 V) negative potentials are studied. The laws of formation of the coatings are determined. The formed coatings are analyzed using a model of two-level action of the implanted ions on them.
引用
收藏
页码:195 / 203
页数:9
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