Initial stages of growth of poly(p-xylylene) coatings: AFM study

被引：9

作者：

Strel'tsov, D. R. ^{[1
]}

Grigor'ev, E. I. ^{[1
]}

Dmitryakov, P. V. ^{[1
]}

Erina, N. A. ^{[2
]}

Mailyan, K. A. ^{[1
]}

Pebalk, A. V. ^{[1
]}

Chvalun, S. N. ^{[1
]}

机构：

[1] LY Karpov Phys Chem Res Inst, Moscow 105064, Russia

[2] Veeco Metrol Grp, Santa Barbara, CA 93117 USA

来源：

POLYMER SCIENCE SERIES A | 2009年 / 51卷 / 08期

基金：

俄罗斯基础研究基金会;

关键词：

CHEMICAL-VAPOR-DEPOSITION; POLY-P-XYLYLENE; PARYLENE; SURFACE; FILMS; POLYMERIZATION; MORPHOLOGY; MODEL;

D O I：

10.1134/S0965545X09080069

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

The morphology of poly(p-xylylene) ultrathin films prepared by vapor deposition polymerization on the surface of single-crystal silicon (100) and on the cleaved surface of mica at a substrate temperature of 20A degrees C has been studied by atomic force microscopy. At the initial stage, the growth of the poly(p-xylylene) coating follows the island mechanism. Within the framework of pyramidal model of island growth, the mean diffusion length for monomer p-xylylene is calculated: For the single-crystal silicon, this parameter is 15 +/- 3 nm; for the cleaved surface of mica, 9 +/- 2 nm. The nature of the substrate and defects on its surface show a peculiar effect on the structure of the poly(p-xylylene) coating. Thus, at a low monomer flow, nucleation of polymer islands on the surface of silicon is predominantly homogeneous, whereas on the cleaved surface of mica, it is heterogeneous. A change in the monomer flow significantly affects the rate of nucleation of polymer islands.

引用

页码：881 / 890

页数：10

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